JPH0554690B2 - - Google Patents

Info

Publication number
JPH0554690B2
JPH0554690B2 JP59101976A JP10197684A JPH0554690B2 JP H0554690 B2 JPH0554690 B2 JP H0554690B2 JP 59101976 A JP59101976 A JP 59101976A JP 10197684 A JP10197684 A JP 10197684A JP H0554690 B2 JPH0554690 B2 JP H0554690B2
Authority
JP
Japan
Prior art keywords
heater
core tube
furnace core
furnace
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59101976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60245215A (ja
Inventor
Kazunori Imaoka
Takao Miura
Akinao Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10197684A priority Critical patent/JPS60245215A/ja
Publication of JPS60245215A publication Critical patent/JPS60245215A/ja
Publication of JPH0554690B2 publication Critical patent/JPH0554690B2/ja
Granted legal-status Critical Current

Links

JP10197684A 1984-05-21 1984-05-21 縦型炉 Granted JPS60245215A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10197684A JPS60245215A (ja) 1984-05-21 1984-05-21 縦型炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10197684A JPS60245215A (ja) 1984-05-21 1984-05-21 縦型炉

Publications (2)

Publication Number Publication Date
JPS60245215A JPS60245215A (ja) 1985-12-05
JPH0554690B2 true JPH0554690B2 (en]) 1993-08-13

Family

ID=14314892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10197684A Granted JPS60245215A (ja) 1984-05-21 1984-05-21 縦型炉

Country Status (1)

Country Link
JP (1) JPS60245215A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0815144B2 (ja) * 1986-04-18 1996-02-14 株式会社日立製作所 縦型処理装置
JPH0693439B2 (ja) * 1987-03-20 1994-11-16 株式会社日立製作所 半導体ウエハの熱処理装置
JPS6437034U (en]) * 1987-08-28 1989-03-06
JPH0744159B2 (ja) * 1987-09-11 1995-05-15 株式会社日立製作所 半導体ウエハの熱処理装置および熱処理方法
JP2756566B2 (ja) * 1987-11-21 1998-05-25 東京エレクトロン株式会社 縦型熱処理装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5443650U (en]) * 1977-08-31 1979-03-26
JPS57117782A (en) * 1981-01-12 1982-07-22 Kokusai Electric Co Ltd Circular electric furnace
JPS5833831A (ja) * 1981-08-24 1983-02-28 Hitachi Ltd 熱処理炉
JPS58135633A (ja) * 1982-02-08 1983-08-12 Hitachi Ltd シリコン・エピタキシヤル成長方法
JPS58145697A (ja) * 1982-02-19 1983-08-30 Olympus Optical Co Ltd エピタキシヤルシリコン製造装置

Also Published As

Publication number Publication date
JPS60245215A (ja) 1985-12-05

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